JPH019167Y2 - - Google Patents
Info
- Publication number
- JPH019167Y2 JPH019167Y2 JP11714585U JP11714585U JPH019167Y2 JP H019167 Y2 JPH019167 Y2 JP H019167Y2 JP 11714585 U JP11714585 U JP 11714585U JP 11714585 U JP11714585 U JP 11714585U JP H019167 Y2 JPH019167 Y2 JP H019167Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- air cylinder
- lifting
- lifting device
- lifting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 12
- 238000005259 measurement Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11714585U JPH019167Y2 (en]) | 1985-07-30 | 1985-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11714585U JPH019167Y2 (en]) | 1985-07-30 | 1985-07-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226038U JPS6226038U (en]) | 1987-02-17 |
| JPH019167Y2 true JPH019167Y2 (en]) | 1989-03-13 |
Family
ID=31002389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11714585U Expired JPH019167Y2 (en]) | 1985-07-30 | 1985-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH019167Y2 (en]) |
-
1985
- 1985-07-30 JP JP11714585U patent/JPH019167Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6226038U (en]) | 1987-02-17 |
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